Inventor
LARA NICK
US3 patents
Patents
3 patentsUS6984613B1Jan 10, 2006
Post chemical mechanical polishing cleaning solution for 2.45T CoFeNi structures of thin film magnetic heads
HITACHI GLOBAL STORAGE TECH2 citations59
US7374621B2May 20, 2008
System and method for cleaning chemistry and processing during thin film magnetic head wafer fabrication
HITACHI GLOBAL STORAGE TECH0 citations49
US7306638B2Dec 11, 2007
Chemical mechanical polishing process for 2.45T CoFeNi structures of thin film magnetic heads
HITACHI GLOBAL STORAGE TECH0 citations49