Inventor

MANGAUDIS MICHAEL JOHN

US2 patents

Patents

2 patents

US7485028B2Feb 3, 2009

Chemical mechanical polishing retaining ring, apparatuses and methods incorporating same

SAINT GOBAIN PERFORMANCE PLAST20 citations88

US7086939B2Aug 8, 2006

Chemical mechanical polishing retaining ring with integral polymer backing

SAINT GOBAIN PERFORMANCE PLAST12 citations79