Inventor

SONOBE JUN

JP7 patents

⚠️ This page may combine multiple inventors who share the name “SONOBE JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI INT ELECTRIC INC

2 patents

US9540727B2Jan 10, 2017

Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and recording medium

HITACHI INT ELECTRIC INC2 citations69

US9683288B2Jun 20, 2017

Method of manufacturing semiconductor device and method of cleaning processing vessel

HITACHI INT ELECTRIC INC1 citations48

KAMEDA KENJI

1 patent

US8679259B2Mar 25, 2014

Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel

KAMEDA KENJI2 citations58

TOKYO ELECTRON LTD

1 patent

US9012331B2Apr 21, 2015

Etching method and non-transitory storage medium

TOKYO ELECTRON LTD3 citations57

HUANG SHIH-WEN

1 patent

US8119853B2Feb 21, 2012

Low pressure acetylene storage

HUANG SHIH-WEN4 citations55

AIRGAS INC

1 patent

US11920732B2Mar 5, 2024

Use of stable isotopes of CO2 to validate cylinder preparation

AIRGAS INC0 citations51

TOSHIBA KK

1 patent

US7942974B2May 17, 2011

Method of cleaning a film-forming apparatus

TOSHIBA KK0 citations48