P

Inventor

SEXTON GREG

US9 patents
⚠️ This page may combine multiple inventors who share the name “SEXTON GREG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents
US6669783B2Dec 30, 2003

High temperature electrostatic chuck

LAM RES CORP92 citations95
US6567258B2May 20, 2003

High temperature electrostatic chuck

LAM RES CORP17 citations90
US6377437B1Apr 23, 2002

High temperature electrostatic chuck

LAM RES CORP41 citations90
US8940098B2Jan 27, 2015

Method for distributing gas for a bevel etcher

LAM RES CORP0 citations51

SEXTON GREG

2 patents
US8475624B2Jul 2, 2013

Method and system for distributing gas for a bevel edge etcher

SEXTON GREG5 citations65
US8826857B2Sep 9, 2014

Plasma processing assemblies including hinge assemblies

SEXTON GREG2 citations58

SALDANA MIGUEL A

2 patents
US8328980B2Dec 11, 2012

Apparatus and methods for enhanced fluid delivery on bevel etch applications

SALDANA MIGUEL A2 citations57
US8671965B2Mar 18, 2014

Methods for enhanced fluid delivery on bevel etch applications

SALDANA MIGUEL A0 citations47

KIM YUNSANG

1 patent
US8137501B2Mar 20, 2012

Bevel clean device

KIM YUNSANG6 citations70