Inventor

YAMAKAWA MAI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “YAMAKAWA MAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SATO MASANOBU

1 patent

US8888925B2Nov 18, 2014

Nozzle, substrate processing apparatus, and substrate processing method

SATO MASANOBU6 citations69

TANAKA TAKAYOSHI

1 patent

US9355872B2May 31, 2016

Substrate treatment apparatus and substrate treatment method

TANAKA TAKAYOSHI4 citations68