Inventor

TSU ROBERT

US20 patents

⚠️ This page may combine multiple inventors who share the name “TSU ROBERT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSU ROBERT

TEXAS INSTRUMENTS INC

Integrated circuit capacitor

Yield improvement of dual damascene fabrication through oxide filling

Selective oxidation methods for metal oxide deposition on metals in capacitor fabrication

Method of making barium strontium titanate (BST) thin film by erbium donor doping

Barium strontium titanate (BST) thin films by erbium donor doping

Barium strontium titanate (BST) thin films using boron

Method for fabricating an integrated circuit structure

Copper transition layer for improving copper interconnection reliability

Copper transition layer for improving copper interconnection reliability

Integrated circuit capacitor

Barium strontium titanate (BST) thin films by holmium donor doping

Reliability enhancement of aluminum interconnects by reacting aluminum leads with a strengthening gas

Line-to-line reliability enhancement using a dielectric liner for a low dielectric constant interlevel and intralevel (or intermetal and intrametal) dielectric layer

Barium strontium titanate (BST) thin films using boron

Processing methods for high-dielectric-constant materials

In-situ doped rough polysilicon storage cell structure formed using gas phase nucleation

HITACHI LTD

Method of manufacturing a semiconductor integrated circuit device having a memory cell array and a peripheral circuit region

Semiconductor integrated circuit device including a DRAM having reduced parasitic bit line capacity and method of manufacturing same

Method of manufacturing semiconductor integrated circuit device including a DRAM having reduced parasitic bit line capacity

Method of manufacturing a semiconductor integrated circuit device including a DRAM having reduced parasitic bit line capacity