Inventor

CHALYKH ROMAN

KR4 patents

⚠️ This page may combine multiple inventors who share the name “CHALYKH ROMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

3 patents

US10719008B2Jul 21, 2020

Phase-shift mask for extreme ultraviolet lithography

SAMSUNG ELECTRONICS CO LTD2 citations69

US11372323B2Jun 28, 2022

Phase-shift mask for extreme ultraviolet lithography

SAMSUNG ELECTRONICS CO LTD0 citations58

US10274820B2Apr 30, 2019

Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same

SAMSUNG ELECTRONICS CO LTD1 citations56

JEON HWANCHUL

1 patent

US9952502B2Apr 24, 2018

Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same

JEON HWANCHUL2 citations61