Inventor
MATSUOKA GEN
JP4 patents
Patents
4 patentsUS9611142B2Apr 4, 2017
Method for manufacturing electronic component
SUMITOMO PRECISION PROD CO2 citations69
US10513430B2Dec 24, 2019
Semiconductor device
SUMITOMO PRECISION PROD CO2 citations67
US11189776B2Nov 30, 2021
Piezoelectric element and method for manufacturing piezoelectric element
SUMITOMO PRECISION PROD CO2 citations65
US11932535B2Mar 19, 2024
MEMS device manufacturing method, MEMS device, and shutter apparatus using the same
SUMITOMO PRECISION PROD CO0 citations44