Inventor
SEO KWONSANG
KR4 patents
Patents
4 patentsUS11869751B2Jan 9, 2024
Upper electrode and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11545344B2Jan 3, 2023
Upper electrode and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12494352B2Dec 9, 2025
Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US12183555B2Dec 31, 2024
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations43