Inventor
JO YOUNGHYUN
KR3 patents
Patents
3 patentsUS11869751B2Jan 9, 2024
Upper electrode and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11545344B2Jan 3, 2023
Upper electrode and substrate processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12526541B2Jan 13, 2026
Method and apparatus with high-resolution image zooming
SAMSUNG ELECTRONICS CO LTD0 citations53