Inventor
NEVILLE ELIZABETH
US9 patents
Patents
9 patentsUS11881416B2Jan 23, 2024
Gas delivery system for a shared gas delivery architecture
APPLIED MATERIALS INC2 citations65
US11515129B2Nov 29, 2022
Radiation shield modification for improving substrate temperature uniformity
APPLIED MATERIALS INC0 citations61
US12443175B2Oct 14, 2025
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
APPLIED MATERIALS INC0 citations59
US12001197B2Jun 4, 2024
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
APPLIED MATERIALS INC0 citations59
US12444621B2Oct 14, 2025
High conductance divert line architecture
APPLIED MATERIALS INC0 citations58
US11978646B2May 7, 2024
Thermal chamber with improved thermal uniformity
APPLIED MATERIALS INC0 citations57
USD1110334SJan 27, 2026
Display screen with graphical user interface
APPLIED MATERIALS INC0 citations56
US12535799B2Jan 27, 2026
Sustainability monitoring platform with sensor support
APPLIED MATERIALS INC0 citations49
US12228905B2Feb 18, 2025
Eco-efficiency monitoring and exploration platform for semiconductor manufacturing
APPLIED MATERIALS INC0 citations45