Inventor
NG EDWARD W
US3 patents
Patents
3 patentsUS11384193B2Jul 12, 2022
Hydrophobic pinning mat for directed self-assembly of diblock copolymer novel compositions and processes for self-assembly of block copolymers
MERCK PATENT GMBH0 citations49
US12509540B2Dec 30, 2025
Development of novel neutral layer and hydrophobic pinning mat materials for use in DSA with improved substrate compatibility
MERCK PATENT GMBH0 citations44
US12583961B2Mar 24, 2026
Tunable high-chi diblock copolymers consisting of alternating copolymer segments for directed self-assembly and application thereof
MERCK PATENT GMBH0 citations42