Inventor

WIHL TIM S

US4 patents

⚠️ This page may combine multiple inventors who share the name “WIHL TIM S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA INSTR CORP

3 patents

US4532650AJul 30, 1985

Photomask inspection apparatus and method using corner comparator defect detection algorithm

KLA INSTR CORP254 citations97

US4805123AFeb 14, 1989

Automatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systems

KLA INSTR CORP369 citations95

US4758094AJul 19, 1988

Process and apparatus for in-situ qualification of master patterns used in patterning systems

KLA INSTR CORP72 citations89

LEWIS ISABELLA T

1 patent

US8629902B2Jan 14, 2014

Coordinate fusion and thickness calibration for semiconductor wafer edge inspection

LEWIS ISABELLA T5 citations65