Inventor
JUR JESSE STEPHEN
US3 patents
Patents
3 patentsUS6558475B1May 6, 2003
Process for cleaning a workpiece using supercritical carbon dioxide
IBM126 citations96
US6892741B2May 17, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM5 citations71
US6953042B2Oct 11, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM2 citations60