Inventor
TAFT CHARLES JESSE
US6 patents
⚠️ This page may combine multiple inventors who share the name “TAFT CHARLES JESSE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS6558475B1May 6, 2003
Process for cleaning a workpiece using supercritical carbon dioxide
IBM126 citations96
US6892741B2May 17, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM5 citations71
US6953042B2Oct 11, 2005
Apparatus and process for supercritical carbon dioxide phase processing
IBM2 citations60
US7890202B2Feb 15, 2011
Method for creating wafer batches in an automated batch process tool
IBM4 citations52