Inventor
KUO JUNG-CHIH
TW4 patents
Patents
4 patentsUS7933015B2Apr 26, 2011
Mark for alignment and overlay, mask having the same, and method of using the same
NANYA TECHNOLOGY CORP5 citations58
US6873399B2Mar 29, 2005
Exposure system and method
NANYA TECHNOLOGY CORP2 citations57
US7046332B2May 16, 2006
Exposure system and method with group compensation
NANYA TECHNOLOGY CORP3 citations54
US7056631B2Jun 6, 2006
Exposure system and method with group compensation
NANYA TECHNOLOGY CORP1 citations44