Inventor
TOYOSHIMA YUYA
JP5 patents
Patents
5 patentsUS7476856B2Jan 13, 2009
Sample dimension-measuring method and charged particle beam apparatus
HITACHI HIGH TECH CORP10 citations83
US7483560B2Jan 27, 2009
Method for measuring three dimensional shape of a fine pattern
HITACHI HIGH TECH CORP10 citations80
US7038767B2May 2, 2006
Three-dimensional micropattern profile measuring system and method
HITACHI HIGH TECH CORP3 citations62
US6894790B2May 17, 2005
Micropattern shape measuring system and method
HITACHI HIGH TECH CORP2 citations61
US7130063B2Oct 31, 2006
Micropattern shape measuring system and method
HITACHI HIGH TECH CORP0 citations51