Inventor

CHANG YUNG-CHIH

TW4 patents

⚠️ This page may combine multiple inventors who share the name “CHANG YUNG-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US7301603B2Nov 27, 2007

Exposure system and method

TAIWAN SEMICONDUCTOR MFG35 citations90

US7751908B2Jul 6, 2010

Method and system for thermal process control

TAIWAN SEMICONDUCTOR MFG8 citations78

CHANG YUNG-CHIH

1 patent

US8925290B2Jan 6, 2015

Mask storage device for mask haze prevention and methods thereof

CHANG YUNG-CHIH4 citations63

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9527649B2Dec 27, 2016

Mask storage device for mask haze prevention

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47