Inventor

CHANG CHIH-WING

TW5 patents

⚠️ This page may combine multiple inventors who share the name “CHANG CHIH-WING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US7635652B2Dec 22, 2009

Mask with hydrophobic surface

TAIWAN SEMICONDUCTOR MFG8 citations79

US6727029B1Apr 27, 2004

Method for making reticles with reduced particle contamination and reticles formed

TAIWAN SEMICONDUCTOR MFG12 citations69

CHANG YUNG-CHIH

1 patent

US8925290B2Jan 6, 2015

Mask storage device for mask haze prevention and methods thereof

CHANG YUNG-CHIH4 citations63

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9527649B2Dec 27, 2016

Mask storage device for mask haze prevention

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47

CHANG CHIH-WING

1 patent

US8142959B2Mar 27, 2012

Method and apparatus for gating photomask contamination

CHANG CHIH-WING0 citations40