Inventor
LIMARY RATCHANA
US4 patents
Patents
4 patentsUS8898928B2Dec 2, 2014
Delamination drying apparatus and method
LAM RES CORP18 citations81
US9466511B2Oct 11, 2016
Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material
LAM RES CORP3 citations66
US12119218B2Oct 15, 2024
Sacrificial protection layer for environmentally sensitive surfaces of substrates
LAM RES CORP1 citations59
US10008396B2Jun 26, 2018
Method for collapse-free drying of high aspect ratio structures
LAM RES CORP0 citations35