Inventor

LIU CHUNG NANG

US3 patents

⚠️ This page may combine multiple inventors who share the name “LIU CHUNG NANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US11562909B2Jan 24, 2023

Directional selective junction clean with field polymer protections

APPLIED MATERIALS INC2 citations72

US12463052B2Nov 4, 2025

Directional selective junction clean with field polymer protections

APPLIED MATERIALS INC0 citations61

SUN NOEL

1 patent

US9533332B2Jan 3, 2017

Methods for in-situ chamber clean utilized in an etching processing chamber

SUN NOEL4 citations63