Inventor

YANG SEEYUB

KR2 patents

Patents

2 patents

US11264291B2Mar 1, 2022

Sensor device and etching apparatus having the same

SAMSUNG ELECTRONICS CO LTD9 citations79

US11715628B2Aug 1, 2023

Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations56