Inventor
ULRICH JUERGEN
DE5 patents
⚠️ This page may combine multiple inventors who share the name “ULRICH JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEYBOLD SYSTEMS GMBH
3 patentsUS6196154B1Mar 6, 2001
Air lock for introducing substrates to and/or removing them from a treatment chamber
LEYBOLD SYSTEMS GMBH32 citations90
US6132562AOct 17, 2000
Method and device for transporting cylindrical substrates to be coated
LEYBOLD SYSTEMS GMBH38 citations90
US6335054B1Jan 1, 2002
Air lock for introducing substrates to and/or removing them from a treatment chamber
LEYBOLD SYSTEMS GMBH8 citations71