Inventor
KOKOTOV YURI
IL14 patents
⚠️ This page may combine multiple inventors who share the name “KOKOTOV YURI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6999836B2Feb 14, 2006
Method, system, and medium for handling misrepresentative metrology data within an advanced process control system
APPLIED MATERIALS INC60 citations95
US7272459B2Sep 18, 2007
Method, system and medium for controlling manufacture process having multivariate input parameters
APPLIED MATERIALS INC42 citations90
US7966087B2Jun 21, 2011
Method, system and medium for controlling manufacture process having multivariate input parameters
APPLIED MATERIALS INC10 citations82
US7668702B2Feb 23, 2010
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC7 citations73
US7970588B2Jun 28, 2011
Method, system and medium for controlling manufacturing process using adaptive models based on empirical data
APPLIED MATERIALS INC2 citations62