Inventor

SATOU HOZUMI

JP3 patents

Patents

3 patents

US7001252B2Feb 21, 2006

Abrasive material

JSR CORP16 citations91

US7217305B2May 15, 2007

Polishing body

JSR CORP2 citations61

US7201641B2Apr 10, 2007

Polishing body

JSR CORP1 citations61