Inventor

KUTSUNA YUJI

JP3 patents

Patents

3 patents

US7322237B2Jan 29, 2008

Gyro sensor of an electrostatic driving and capacitance detecting type

DENSO CORP27 citations86

US7197930B2Apr 3, 2007

Gyro sensor

DENSO CORP7 citations71

US7229858B2Jun 12, 2007

Semiconductor wafer and semiconductor device manufacturing method using the same

DENSO CORP3 citations57