Inventor

JACQUES JEANNETTE M

US2 patents

Patents

2 patents

US7341941B2Mar 11, 2008

Methods to facilitate etch uniformity and selectivity

TEXAS INSTRUMENTS INC2 citations60

US7342315B2Mar 11, 2008

Method to increase mechanical fracture robustness of porous low k dielectric materials

TEXAS INSTRUMENTS INC2 citations58