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Inventor
YONEKURA ISAO
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “YONEKURA ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANTEST CORP
1 patent
US9236218B2
Jan 12, 2016
Defect inspection apparatus and method using a plurality of detectors to generate a subtracted image that may be used to form a subtraction profile
ADVANTEST CORP
3 citations
70
MURAKAWA TSUTOMU
1 patent
US8604431B2
Dec 10, 2013
Pattern-height measuring apparatus and pattern-height measuring method
MURAKAWA TSUTOMU
6 citations
67
OGISO YOSHIAKI
1 patent
US8779359B2
Jul 15, 2014
Defect review apparatus and defect review method
OGISO YOSHIAKI
6 citations
65
YONEKURA ISAO
1 patent
US8754935B2
Jun 17, 2014
Microstructure inspection method, microstructure inspection apparatus, and microstructure inspection program
YONEKURA ISAO
0 citations
28