Inventor

TRUE EMILY M

US2 patents

Patents

2 patents

US10269662B2Apr 23, 2019

Scanning methods for focus control for lithographic processing of reconstituted wafers

ULTRATECH INC1 citations50

US9436103B2Sep 6, 2016

Wynne-Dyson projection lens with reduced susceptibility to UV damage

ULTRATECH INC1 citations47