Inventor
FITZSIMMONS JOHN ANTHONY
US5 patents
Patents
5 patentsUS6784485B1Aug 31, 2004
Diffusion barrier layer and semiconductor device containing same
IBM25 citations91
US7488679B2Feb 10, 2009
Interconnect structure and process of making the same
IBM13 citations79
US6657305B1Dec 2, 2003
Semiconductor recessed mask interconnect technology
IBM12 citations72
US6726996B2Apr 27, 2004
Laminated diffusion barrier
IBM8 citations69
US7341948B2Mar 11, 2008
Method of making a semiconductor structure with a plating enhancement layer
IBM8 citations68