Inventor
HERBST BRIAN WAYNE
US3 patents
Patents
3 patentsUS6207787B1Mar 27, 2001
Antireflective coating for microlithography
IBM51 citations92
US5736301AApr 7, 1998
Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used
IBM20 citations89
US6657305B1Dec 2, 2003
Semiconductor recessed mask interconnect technology
IBM12 citations72