Inventor

GROHOLSKI ALEXANDER

US10 patents

⚠️ This page may combine multiple inventors who share the name “GROHOLSKI ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CARL ZEISS MICROSCOPY LLC

4 patents

US9536699B2Jan 3, 2017

Charged particle beam system and method of operating a charged particle beam system

CARL ZEISS MICROSCOPY LLC0 citations50

US9029765B2May 12, 2015

Ion sources, systems and methods

CARL ZEISS MICROSCOPY LLC0 citations50

US9530612B2Dec 27, 2016

Charged particle beam system and method of operating a charged particle beam system

CARL ZEISS MICROSCOPY LLC0 citations48

US9530611B2Dec 27, 2016

Charged particle beam system and method of operating a charged particle beam system

CARL ZEISS MICROSCOPY LLC0 citations48

MEO ENG COMPANY INC

2 patents

US12270105B2Apr 8, 2025

Method and apparatus for precursor gas injection

MEO ENG COMPANY INC0 citations52

US11261527B2Mar 1, 2022

Method and apparatus for precursor gas injection

MEO ENG COMPANY INC1 citations52

ALIS CORP

1 patent

US7786451B2Aug 31, 2010

Ion sources, systems and methods

ALIS CORP58 citations96

FEI CO

1 patent

US6661009B1Dec 9, 2003

Apparatus for tilting a beam system

FEI CO14 citations78

COMUNALE RICHARD

1 patent

US8461557B2Jun 11, 2013

Ion sources, systems and methods

COMUNALE RICHARD5 citations76

WARD BILLY W

1 patent

US8633451B2Jan 21, 2014

Ion sources, systems and methods

WARD BILLY W2 citations58