Inventor
OISHI TOMOYUKI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OISHI TOMOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS11244828B2Feb 8, 2022
Method for processing workpiece
TOKYO ELECTRON LTD2 citations71
US9859126B2Jan 2, 2018
Method for processing target object
TOKYO ELECTRON LTD3 citations71
US12300500B2May 13, 2025
Etching of polycrystalline semiconductors
TOKYO ELECTRON LTD0 citations61
US11823903B2Nov 21, 2023
Method for processing workpiece
TOKYO ELECTRON LTD0 citations61
US10714340B2Jul 14, 2020
Method for processing workpiece
TOKYO ELECTRON LTD0 citations51
US9911622B2Mar 6, 2018
Method of processing target object
TOKYO ELECTRON LTD0 citations40
US9721766B2Aug 1, 2017
Method for processing target object
TOKYO ELECTRON LTD0 citations40