Inventor
Mutyala Madhu Santosh Kumar
US10 patents
⚠️ This page may combine multiple inventors who share the name “Mutyala Madhu Santosh Kumar”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS12412741B2Sep 9, 2025
Silicon oxide gap fill using capacitively coupled plasmas
APPLIED MATERIALS INC0 citations61
US11430654B2Aug 30, 2022
Initiation modulation for plasma deposition
APPLIED MATERIALS INC0 citations61
US11270903B2Mar 8, 2022
Multi zone electrostatic chuck
APPLIED MATERIALS INC0 citations61
US12338530B2Jun 24, 2025
Shaped showerhead for edge plasma modulation
APPLIED MATERIALS INC0 citations58
US11929278B2Mar 12, 2024
Low impedance current path for edge non-uniformity tuning
APPLIED MATERIALS INC0 citations58
US11869795B2Jan 9, 2024
Mesa height modulation for thickness correction
APPLIED MATERIALS INC0 citations58
US11600468B2Mar 7, 2023
Multi channel splitter spool
APPLIED MATERIALS INC0 citations58
US12562355B2Feb 24, 2026
Isolator for processing chambers
APPLIED MATERIALS INC0 citations56
US11817313B2Nov 14, 2023
Methods for pressure ramped plasma purge
APPLIED MATERIALS INC0 citations50