Inventor

MASUMURA HISASHI

JP36 patents

⚠️ This page may combine multiple inventors who share the name “MASUMURA HISASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MASUMURA HISASHI

SHINETSU HANDOTAI KK

Method of manufacturing semiconductor wafers

Carrier for double-side polishing

Method of polishing semiconductor wafers

Method of manufacturing semiconductor wafers

Automatic workpiece transport apparatus for double-side polishing machine

Apparatus and method for double-sided polishing semiconductor wafers

Method of manufacturing semiconductor mirror wafers

Wafer manufacturing method, polishing apparatus, and wafer

Polishing method and polishing device

Polishing method for semiconductor wafer and polishing pad used therein

Method of manufacturing semiconductor mirror wafers

Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece

Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers

Method of making semiconductor wafers

Method for production of wafer

Polishing head and polishing apparatus

Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus

Polishing head, polishing apparatus and polishing method for semiconductor wafer

Polishing pad used for polishing silicon wafers and polishing method using the same

Method for inducing damage for gettering to single crystal silicon wafer

Polishing agent used for polishing semiconductor wafers and polishing method using the same

Polishing agent used for polishing semiconductor wafers and polishing method using the same

Wafer polishing method, wafer cleaning method and wafer protective film

Method of and apparatus for determining residual damage to wafer edges

Epitaxial wafer

Method and pad for polishing wafer

Method and apparatus for polishing work

Polishing agent used for polishing silicon wafers and polishing method using the same

Polishing head and polishing apparatus having the same

Workpiece holder for polishing, polishing apparatus and polishing method

MASUMURA HISASHI

Workpiece holder for polishing, workpiece polishing apparatus and polishing method

Polishing head and polishing apparatus

Polishing head, polishing apparatus and method for demounting workpiece

Polishing head and polishing apparatus

SHIN ETSU HANDOTAI & CO LTD

Process for manufacturing semiconductor wafer and semiconductor wafer

SHIN ETSU HANDOTAI CO LTD

Epitaxial wafer cleaning method