Inventor
BEHNKE JOHN R
US5 patents
Patents
5 patentsUS6245581B1Jun 12, 2001
Method and apparatus for control of critical dimension using feedback etch control
ADVANCED MICRO DEVICES INC204 citations97
US6995437B1Feb 7, 2006
Semiconductor device with core and periphery regions
ADVANCED MICRO DEVICES INC69 citations96
US6133132AOct 17, 2000
Method for controlling transistor spacer width
ADVANCED MICRO DEVICES INC46 citations95
US6780708B1Aug 24, 2004
Method of forming core and periphery gates including two critical masking steps to form a hard mask in a core region that includes a critical dimension less than achievable at a resolution limit of lithography
ADVANCED MICRO DEVICES INC57 citations94
US6409879B1Jun 25, 2002
System for controlling transistor spacer width
ADVANCED MICRO DEVICES INC21 citations91