Inventor
HAGIHARA MASAAKI
US8 patents
⚠️ This page may combine multiple inventors who share the name “HAGIHARA MASAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS7465673B2Dec 16, 2008
Method and apparatus for bilayer photoresist dry development
TOKYO ELECTRON LTD7 citations70
US6780342B1Aug 24, 2004
Method of etching and method of plasma treatment
TOKYO ELECTRON LTD7 citations70
US7743731B2Jun 29, 2010
Reduced contaminant gas injection system and method of using
TOKYO ELECTRON LTD3 citations59
US7709397B2May 4, 2010
Method and system for etching a high-k dielectric material
TOKYO ELECTRON LTD1 citations50
US7211197B2May 1, 2007
Etching method and plasma processing method
TOKYO ELECTRON LTD0 citations48
US7582220B1Sep 1, 2009
Etching method
TOKYO ELECTRON LTD0 citations41