Inventor
HANSEN THOMAS A
US8 patents
⚠️ This page may combine multiple inventors who share the name “HANSEN THOMAS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS4549927AOct 29, 1985
Method of selectively exposing the sidewalls of a trench and its use to the forming of a metal silicide substrate contact for dielectric filled deep trench isolated devices
IBM78 citations95
US4726879AFeb 23, 1988
RIE process for etching silicon isolation trenches and polycides with vertical surfaces
IBM79 citations94
US4589193AMay 20, 1986
Metal silicide channel stoppers for integrated circuits and method for making the same
IBM85 citations94
US4534826AAug 13, 1985
Trench etch process for dielectric isolation
IBM51 citations91
US4541168ASep 17, 1985
Method for making metal contact studs between first level metal and regions of a semiconductor device compatible with polyimide-filled deep trench isolation schemes
IBM32 citations88
US4229233AOct 21, 1980
Method for fabricating non-reflective semiconductor surfaces by anisotropic reactive ion etching
IBM22 citations79