Inventor
KAPLITA GEORGE A
US6 patents
Patents
6 patentsUS4707218ANov 17, 1987
Lithographic image size reduction
IBM220 citations96
US4726879AFeb 23, 1988
RIE process for etching silicon isolation trenches and polycides with vertical surfaces
IBM79 citations94
US4595484AJun 17, 1986
Reactive ion etching apparatus
IBM66 citations94
US4871630AOct 3, 1989
Mask using lithographic image size reduction
IBM68 citations93
US6429067B1Aug 6, 2002
Dual mask process for semiconductor devices
IBM15 citations81
US6328041B1Dec 11, 2001
Universal cleaning wafer for a plasma chamber
IBM11 citations70