Inventor
NAITO WAKAKO
JP3 patents
Patents
3 patentsUS6780342B1Aug 24, 2004
Method of etching and method of plasma treatment
TOKYO ELECTRON LTD7 citations70
US7211197B2May 1, 2007
Etching method and plasma processing method
TOKYO ELECTRON LTD0 citations48
US7943523B2May 17, 2011
Plasma etching method and computer readable storage medium
TOKYO ELECTRON LTD0 citations38