Inventor
SUGARMAN MICHAEL
US21 patents
Patents
21 patentsUS6258220B1Jul 10, 2001
Electro-chemical deposition system
APPLIED MATERIALS INC443 citations98
US6416647B1Jul 9, 2002
Electro-chemical deposition cell for face-up processing of single semiconductor substrates
APPLIED MATERIALS INC476 citations97
US6523553B1Feb 25, 2003
Wafer edge cleaning method and apparatus
APPLIED MATERIALS INC45 citations96
US6290865B1Sep 18, 2001
Spin-rinse-drying process for electroplated semiconductor wafers
APPLIED MATERIALS INC77 citations96
US6635157B2Oct 21, 2003
Electro-chemical deposition system
APPLIED MATERIALS INC43 citations95
US6904637B2Jun 14, 2005
Scrubber with sonic nozzle
APPLIED MATERIALS INC23 citations92
US6797074B2Sep 28, 2004
Wafer edge cleaning method and apparatus
APPLIED MATERIALS INC26 citations92
US6474712B1Nov 5, 2002
Gripper for supporting substrate in a vertical orientation
APPLIED MATERIALS INC42 citations92
US6423636B1Jul 23, 2002
Process sequence for improved seed layer productivity and achieving 3mm edge exclusion for a copper metalization process on semiconductor wafer
APPLIED MATERIALS INC47 citations92
US6955516B2Oct 18, 2005
Single wafer dryer and drying methods
APPLIED MATERIALS INC33 citations91
US6516816B1Feb 11, 2003
Spin-rinse-dryer
APPLIED MATERIALS INC21 citations91
US6918864B1Jul 19, 2005
Roller that avoids substrate slippage
APPLIED MATERIALS INC19 citations90
US7063749B2Jun 20, 2006
Scrubber with sonic nozzle
APPLIED MATERIALS INC11 citations84
US7497932B2Mar 3, 2009
Electro-chemical deposition system
APPLIED MATERIALS INC9 citations82
US6599402B2Jul 29, 2003
Electro-chemical deposition cell for face-up processing of single semiconductor substrates
APPLIED MATERIALS INC13 citations82
US6520315B1Feb 18, 2003
Gripper assembly
APPLIED MATERIALS INC14 citations82
US7980255B2Jul 19, 2011
Single wafer dryer and drying methods
APPLIED MATERIALS INC10 citations81
US6820298B2Nov 23, 2004
Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint
APPLIED MATERIALS INC6 citations74
US6921494B2Jul 26, 2005
Backside etching in a scrubber
APPLIED MATERIALS INC8 citations73
US6728989B2May 4, 2004
Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber
APPLIED MATERIALS INC12 citations70
US7226514B2Jun 5, 2007
Spin-rinse-dryer
APPLIED MATERIALS INC1 citations51