Inventor
TSUJI TOSHIHIKO
JP57 patents
⚠️ This page may combine multiple inventors who share the name “TSUJI TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
30 patentsUS5486919AJan 23, 1996
Inspection method and apparatus for inspecting a particle, if any, on a substrate having a pattern
CANON KK155 citations99
US5767962AJun 16, 1998
Inspection system and device manufacturing method using the same
CANON KK102 citations98
US5270794ADec 14, 1993
Fine structure evaluation apparatus and method
CANON KK97 citations96
US7265816B2Sep 4, 2007
Illumination optical system, exposure apparatus, and device manufacturing method with modified illumination generator
CANON KK44 citations93
US7239375B2Jul 3, 2007
Illumination apparatus, exposure apparatus and device manufacturing method
CANON KK19 citations93
US7130025B2Oct 31, 2006
Illumination apparatus, exposure apparatus and device manufacturing method
CANON KK21 citations93
US6946666B2Sep 20, 2005
Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
CANON KK20 citations93
US6885432B2Apr 26, 2005
Projection exposure apparatus and device manufacturing method
CANON KK19 citations93
US6816234B2Nov 9, 2004
Illumination optical system in exposure apparatus
CANON KK16 citations93
US6392742B1May 21, 2002
Illumination system and projection exposure apparatus
CANON KK46 citations93
US6285855B1Sep 4, 2001
Illumination system and exposure apparatus having the same
CANON KK46 citations93
US5861952AJan 19, 1999
Optical inspection method and apparatus including intensity modulation of a light beam and detection of light scattered at an inspection position
CANON KK37 citations93
US5751426AMay 12, 1998
Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object
CANON KK37 citations93
US5591985AJan 7, 1997
Surface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second light
CANON KK27 citations93
US5585918ADec 17, 1996
Foreign particle inspecting system
CANON KK39 citations93
US5461474AOct 24, 1995
Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same
CANON KK49 citations93
US5432603AJul 11, 1995
Optical heterodyne interference measuring apparatus and method, and exposing apparatus and device manufacturing method using the same, in which a phase difference between beat signals is detected
CANON KK36 citations93
US7538856B2May 26, 2009
Illumination optical system and exposure apparatus including the same
CANON KK36 citations92
US7274435B2Sep 25, 2007
Exposure apparatus and device fabrication method using the same
CANON KK20 citations92
US5652657AJul 29, 1997
Inspection system for original with pellicle
CANON KK44 citations92
US6919951B2Jul 19, 2005
Illumination system, projection exposure apparatus and device manufacturing method
CANON KK19 citations84
US6606195B2Aug 12, 2003
Optical unit and optical instrument having the same
CANON KK9 citations74
US5742386AApr 21, 1998
Apparatus for detecting foreign matter on a substrate, and an exposure apparatus including the same
CANON KK14 citations74
US7110084B2Sep 19, 2006
Illumination optical system and exposure apparatus
CANON KK3 citations63
US7064806B2Jun 20, 2006
Illumination optical system and exposure apparatus
CANON KK5 citations63
US6856392B1Feb 15, 2005
Optical element with alignment mark, and optical system having such optical element
CANON KK3 citations63
US6806477B1Oct 19, 2004
Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
CANON KK6 citations63
US6753943B2Jun 22, 2004
Scanning exposure apparatus and device manufacturing method using the same
CANON KK2 citations63
US7714987B2May 11, 2010
Exposure apparatus
CANON KK4 citations62
US7324187B2Jan 29, 2008
Illumination system and exposure apparatus
CANON KK4 citations62
NIKON CORP
15 patentsUS5424552AJun 13, 1995
Projection exposing apparatus
NIKON CORP162 citations99
US5137349AAug 11, 1992
Projection-type optical apparatus
NIKON CORP63 citations95
US6169602B1Jan 2, 2001
Inspection method and apparatus for projection optical systems
NIKON CORP31 citations93
US6151122ANov 21, 2000
Inspection method and apparatus for projection optical systems
NIKON CORP34 citations93
US5894341AApr 13, 1999
Exposure apparatus and method for measuring a quantity of light with temperature variations
NIKON CORP34 citations93
US7116396B2Oct 3, 2006
Exposure device, exposure method and device manufacturing method
NIKON CORP20 citations92
US6922910B2Aug 2, 2005
Exposure apparatus
NIKON CORP20 citations92
US5798838AAug 25, 1998
Projection exposure apparatus having function of detecting intensity distribution of spatial image, and method of detecting the same
NIKON CORP40 citations92
US6549277B1Apr 15, 2003
Illuminance meter, illuminance measuring method and exposure apparatus
NIKON CORP31 citations90
US6542222B1Apr 1, 2003
Beam output control method, beam output apparatus and exposure system, and device manufacturing method using the exposure system
NIKON CORP23 citations88
US6850327B2Feb 1, 2005
Inspection method and apparatus for projection optical systems
NIKON CORP12 citations84
US6525817B1Feb 25, 2003
Inspection method and apparatus for projection optical systems
NIKON CORP6 citations74
US6211947B1Apr 3, 2001
Illuminance distribution measuring method, exposing method and device manufacturing method
NIKON CORP13 citations74
US6603532B2Aug 5, 2003
Illuminance measurement apparatus, exposure apparatus, and exposure method
NIKON CORP8 citations66
US6903799B2Jun 7, 2005
Exposure method and exposure apparatus
NIKON CORP6 citations63
NIPPON KINZOKU CO LTD
2 patentsSENDAI NIKON CORP
1 patentTOYO KOGYO CO
1 patentHIGAKI YOSHINARI
1 patentShowing the top 50 of 57 patents by PatentIndex Score.