Inventor
BURKE ROBERT JAMES
US8 patents
Patents
8 patentsUS5825498AOct 20, 1998
Ultraviolet light reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC54 citations96
US6275292B1Aug 14, 2001
Reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC23 citations92
US6195163B1Feb 27, 2001
Reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC18 citations92
US5783804AJul 21, 1998
Reflectance method for accurate process calibration in semiconductor substrate heat treatment
MICRON TECHNOLOGY INC20 citations92
US6594013B2Jul 15, 2003
Reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC8 citations73
US6327040B2Dec 4, 2001
Reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC7 citations73
US6452678B2Sep 17, 2002
Reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC2 citations62
US6417928B2Jul 9, 2002
Reflectance method for evaluating the surface characteristics of opaque materials
MICRON TECHNOLOGY INC0 citations52