Inventor
KAO RONG-HUI
TW4 patents
Patents
4 patentsUS6503333B2Jan 7, 2003
Method for cleaning semiconductor wafers with ozone-containing solvent
TAIWAN SEMICONDUCTOR MFG24 citations91
US7220650B2May 22, 2007
Sidewall spacer for semiconductor device and fabrication method thereof
TAIWAN SEMICONDUCTOR MFG10 citations82
US6589356B1Jul 8, 2003
Method for cleaning a silicon-based substrate without NH4OH vapor damage
TAIWAN SEMICONDUCTOR MFG5 citations60
US6425191B1Jul 30, 2002
Apparatus and method for reducing solvent residue in a solvent-type dryer for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG6 citations60