Inventor
GUO MING-DAR
TW4 patents
Patents
4 patentsUS6405452B1Jun 18, 2002
Method and apparatus for drying wafers after wet bench
TAIWAN SEMICONDUCTOR MFG14 citations81
US6425191B1Jul 30, 2002
Apparatus and method for reducing solvent residue in a solvent-type dryer for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG6 citations60
US6500274B2Dec 31, 2002
Apparatus and method for wet cleaning wafers without ammonia vapor damage
TAIWAN SEMICONDUCTOR MFG0 citations50
US6647998B2Nov 18, 2003
Electrostatic charge-free solvent-type dryer for semiconductor wafers
TAIWAN SEMICONDUCTOR MFG0 citations46