Inventor
TAKAMATSU JUN
JP16 patents
⚠️ This page may combine multiple inventors who share the name “TAKAMATSU JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
8 patentsUS5539211AJul 23, 1996
Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus
TOSHIBA KK56 citations96
US6207117B1Mar 27, 2001
Charged particle beam apparatus and gas supply and exhaustion method employed in the apparatus
TOSHIBA KK20 citations92
US6172364B1Jan 9, 2001
Charged particle beam irradiation apparatus
TOSHIBA KK31 citations92
US6606149B1Aug 12, 2003
Optical system adjusting method for energy beam apparatus
TOSHIBA KK11 citations73
US5949076ASep 7, 1999
Charged beam applying apparatus
TOSHIBA KK12 citations73
US6836319B2Dec 28, 2004
Optical system adjusting method for energy beam apparatus
TOSHIBA KK2 citations62
US6781680B1Aug 24, 2004
Optical system adjusting method for energy beam apparatus
TOSHIBA KK2 citations62
US6617592B2Sep 9, 2003
Charged particle beam system and chamber of charged particle beam system
TOSHIBA KK1 citations51