Inventor
SUNAOSHI HITOSHI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “SUNAOSHI HITOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
6 patentsUS6606149B1Aug 12, 2003
Optical system adjusting method for energy beam apparatus
TOSHIBA KK11 citations73
US5843603ADec 1, 1998
Method of evaluating shaped beam of charged beam writer and method of forming pattern
TOSHIBA KK14 citations73
US6028317AFeb 22, 2000
Charged particle beam optical element charged particle beam exposure apparatus and method of adjusting the same
TOSHIBA KK12 citations72
US6836319B2Dec 28, 2004
Optical system adjusting method for energy beam apparatus
TOSHIBA KK2 citations62
US6781680B1Aug 24, 2004
Optical system adjusting method for energy beam apparatus
TOSHIBA KK2 citations62
US6617592B2Sep 9, 2003
Charged particle beam system and chamber of charged particle beam system
TOSHIBA KK1 citations51
NUFLARE TECHNOLOGY INC
5 patentsUS7679068B2Mar 16, 2010
Method of calculating deflection aberration correcting voltage and charged particle beam writing method
NUFLARE TECHNOLOGY INC8 citations83
US7485879B2Feb 3, 2009
Electron beam writing apparatus and writing method
NUFLARE TECHNOLOGY INC9 citations83
US7652271B2Jan 26, 2010
Charged-particle beam lithography with grid matching for correction of beam shot position deviation
NUFLARE TECHNOLOGY INC9 citations82
US7977654B2Jul 12, 2011
Writing apparatus and writing method
NUFLARE TECHNOLOGY INC3 citations61
US7923704B2Apr 12, 2011
Charged particle beam writing method
NUFLARE TECHNOLOGY INC3 citations61