Inventor
PARK NAE-HAK
KR11 patents
⚠️ This page may combine multiple inventors who share the name “PARK NAE-HAK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LG SEMICON CO LTD
8 patentsUS5767013AJun 16, 1998
Method for forming interconnection in semiconductor pattern device
LG SEMICON CO LTD88 citations96
US6096646AAug 1, 2000
Method for forming metal line of semiconductor device
LG SEMICON CO LTD26 citations92
US5801099ASep 1, 1998
Method for forming interconnection of semiconductor device
LG SEMICON CO LTD32 citations92
US5663102ASep 2, 1997
Method for forming multi-layered metal wiring semiconductor element using cmp or etch back
LG SEMICON CO LTD25 citations91
US5792704AAug 11, 1998
Method for fabricating wiring in semiconductor device
LG SEMICON CO LTD16 citations73
US6133598AOct 17, 2000
Semiconductor device with diagonal capacitor bit line and fabrication method thereof
LG SEMICON CO LTD4 citations62
US6004397ADec 21, 1999
TEOS-O3 oxidizing film depositing system and process for supplying ozone (O3) thereto
LG SEMICON CO LTD6 citations62
US5891810AApr 6, 1999
Process for supplying ozone (O3) to TEOS-O3 oxidizing film depositing system
LG SEMICON CO LTD4 citations62
HYUNDAI ELECTRONICS IND
3 patentsUS6344391B1Feb 5, 2002
Fabrication method of semiconductor device with diagonal capacitor bit line
HYUNDAI ELECTRONICS IND6 citations73
US6573186B2Jun 3, 2003
Method for forming plug of semiconductor device
HYUNDAI ELECTRONICS IND3 citations61
US6573174B2Jun 3, 2003
Method for reducing surface defects of semiconductor substrates
HYUNDAI ELECTRONICS IND4 citations54