Inventor
CHOI KYUE-SANG
KR10 patents
Patents
10 patentsUS6213856B1Apr 10, 2001
Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk
SAMSUNG ELECTRONICS CO LTD166 citations98
US6150762ANov 21, 2000
Method of manufacturing cathode for plasma etching apparatus using chemical surface treatment with potassium hydroxide (KOH), and cathode manufactured thereby
SAMSUNG ELECTRONICS CO LTD25 citations89
US6018415AJan 25, 2000
X-Y table having belt drives for moving a stage of the table in fine increments and microscope comprising the same
SAMSUNG ELECTRONICS CO LTD27 citations87
US5785929AJul 28, 1998
Waste gas disposal apparatus
SAMSUNG ELECTRONICS CO LTD17 citations79
US6740169B2May 25, 2004
Method of reworking a conditioning disk
SAMSUNG ELECTRONICS CO LTD6 citations73
US6494927B2Dec 17, 2002
Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk
SAMSUNG ELECTRONICS CO LTD3 citations62
US6023368AFeb 8, 2000
Illumination system for use with an optical instrument having an auxiliary magnifying lens
SAMSUNG ELECTRONICS CO LTD5 citations60
US7988812B2Aug 2, 2011
Substrate treatment apparatus
SAMSUNG ELECTRONICS CO LTD2 citations53
US6596087B2Jul 22, 2003
Method of cleaning conditioning disk
SAMSUNG ELECTRONICS CO LTD0 citations51
US6903336B2Jun 7, 2005
Polarity exchanger and ion implanter having the same
SAMSUNG ELECTRONICS CO LTD0 citations46