Inventor

PHILLIPS ANNA M

US3 patents

Patents

3 patents

US6924184B2Aug 2, 2005

Semiconductor device and method for forming a semiconductor device using post gate stack planarization

FREESCALE SEMICONDUCTOR INC27 citations89

US6891229B2May 10, 2005

Inverted isolation formed with spacers

FREESCALE SEMICONDUCTOR INC6 citations59

US6881681B2Apr 19, 2005

Film deposition on a semiconductor wafer

FREESCALE SEMICONDUCTOR INC1 citations48